In order to reduce the influence of damping coupling error,stiffness coupling error and force coupling error of micro electromechanical system(MEMS)gyroscopes,a coupling error coefficient identification and reliability verification method based on frequency sweep detection is provided.Firstly,the dynamic equation of the micro mechanical gyroscope is extended and an error model is established,indicating that coupling errors causes instability in the gyroscope output and is difficult to eliminate.Secondly,a coupling error coefficient identification method is derived,the impact of amplitude and phase detection errors on identification accuracy is analyzed through numerical simulation,and then,the theoretical relative error distribution of identification results under different error coefficients is given.The results indicate that the proposed method has limitations in identifying the range of coupling error coefficients,and the impact of measurement errors on identification results cannot be ignored.Finally,the coupling error coefficient of a gyroscope is verified by experiment.The results show that the identification errors of the force coupling coefficient,damping coupling coefficient,and stiffness coupling coefficient of the gyroscope are 0.542 ppm,6.09%and 0.205 ppm,respectively.The goodness of fit of the identification curve is 0.99.
micro electromechanical system gyroscopecoupling errorscoefficient identificationswept-frequency measurement
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