一种摆式谐振加速度计的微杠杆结构设计与分析
Microlever structure design and analysis of pendulum resonant accelerometer
周严 1张宇轩 1姚志超 2吴天豪 1苏岩 1张晶1
作者信息
- 1. 南京理工大学 MEMS惯性技术研究中心,南京 210094
- 2. 中国兵器工业导航与控制技术研究所,北京 100089
- 折叠
摘要
为提升摆式谐振式加速度计性能,设计了一种将质量块与微杠杆结构一体化的摆式微杠杆结构,实现惯性力的敏感与放大,提升结构的鲁棒性.首先建立了微杠杆结构力学模型,并进行了关键参数计算.其次,根据微杠杆结构放大倍数影响机理,分析了质量块、支撑梁及微杠杆结构尺寸参数对放大倍数的影响;理论分析与有限元仿真结果均表明,支点梁与输出梁的宽度应作为该类微杠杆的关键优化参数.最后,根据上述结论对现有结构尺寸进行优化,优化后的微杠杆放大倍数为 15.68,系统放大倍数为 12.88,标度因数为 70.52 Hz/g,较优化前分别提升了 36.94%、36.87%和 36.88%,验证了优化方法的有效性.
Abstract
In order to improve the performance of pendulum resonant accelerometer,a pendulum micro-lever structure is designed by integrating mass block and microlever structure,which realizes the sensitivity and inertial force amplification and improves the robustness of the structure.Firstly,the mechanical model of microlever structure is established and the key parameters are calculated.Subsequently,according to the theoretical model of microlever structure magnification,the impacts of dimensional parameters of the mass block,supporting beams,and micro-lever structure on the amplification factor are analyzed.Both theoretical analysis and finite element simulation results suggested that the width of the pivot beam and output beam should be regarded as key optimization parameters for such micro-lever structures.Finally,based on these findings,optimization of the existing structural dimensions is conducted,resulting in an optimized micro-lever amplification factor of 15.68,a system amplification factor of 12.88,and a scale factor of 70.52 Hz/g,reflecting improvements of 36.94%,36.87%,and 36.88%higher than before optimization.The effectiveness of the optimization method is verified.
关键词
谐振式加速度计/摆式结构/微杠杆/放大倍数Key words
resonant accelerometer/pendulum structure/microlever/magnification引用本文复制引用
基金项目
国家重点研发计划(2021YFB3201600)
国家自然科学基金(62101263)
出版年
2024
NETL
NSTL
万方数据