Aiming at the low induced voltage output from detection electrodes in quartz MEMS gyroscopes,the mechanical sensitivity is improved by optimizing the distribution parameters of the sensing electrodes.Firstly,the influence of sensing electrode distribution parameters on the induced charge of gyroscope is analyzed,and the control parameters and objective function of the optimization scheme are determined.Secondly,electromechanical coupling models of three kinds of quartz MEMS gyroscope based on finite element method(FEM)are constructed.Finally,the distribution parameters of sensing electrodes are optimized by the Nelder-Mead(NM)algorithm.The experimental results indicate that the optimized distribution of detection electrodes is more reasonable.Specifically,the mechanical sensitivity on the traditional double-ended and comb tuning fork structures has been improved by 3.06 and 1.53 times,respectively,and the structure based on shear stress detection is increased by 39.37 times,which demonstrates the feasibility of enhancing the performance of quartz MEMS gyroscopes through the optimization of sensing electrode distribution parameters,providing a technical reference for similar research in the field.
quartz MEMS gyroscopesensing electrode optimizationfinite element methodNelder-Mead algorithmmechanical sensitivity
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