Development of high-precision beam splitter for inter-satellite communication system
With the rapid development of inter-satellite communication systems,the requirements for data transmission accuracy are constantly increasing.As the core component,the spectral characteristics and sur-face shape accuracy of the beam splitter directly affect the transmission accuracy of the whole system.Ac-cording to the interference theory of thin film,Ta2O5 and SiO2 were selected as the high and low refractive index film materials for the design of the film system,and electron beam evaporation was used to prepare a high-precision beam splitter on a quartz substrate.At the same time,a surface shape correction model was es-tablished based on the principle of film stress compensation to control the surface shape.Through the detec-tion of a spectral analyzer,it can be seen that the transmittance of beam splitter is greater than 98%at 1563 nm and the reflectance is greater than 99%at 1540 nm within the incidence range of 21.5°to 23.5°.The surface shape was measured by laser interferometer,it can be seen that the reflective surface shape ac-curacy RMS is corrected from λ/10 to λ/90(λ=632.8 nm),and the transmissive optical surface shape accur-acy RMS is λ/90.
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