首页|Study of bias voltage effect on the performance of ta-C coating prepared by high power impulse magnetron sputtering
Study of bias voltage effect on the performance of ta-C coating prepared by high power impulse magnetron sputtering
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The mechanical and frictional properties of ta-C coatings deposited on the substrate surface affect applications in the field of cut-ting tools and wear-resistant components.In this paper,the effect of bias parameters on the performance of ta-C coatings was investigated based on high power impulse magnetron sputtering(HiPIMS)technology.The results show that bias voltage has a significant effect on the deposition rate,structure,and wear resistance of the coating.In the range of bias voltage-50 V to-200 V,the ta-C coating performance was the best under bias voltage-150 V.The thickness reached 530.4 nm,the hardness value reached 35.996 GPa,and the bonding force in-creased to 14.2 N.The maximum sp3 bond content was 59.53%at this condition.
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