Design and Implementation of Automated Operation System for Semiconductor Manufacturing Equipment
This article proposes a universal framework model for equipment automation in semiconductor computer integrated manufacturing systems,which has been validated in practical production.This framework model includes modules such as underlying communication driver(SECS/GEM),SML parsing,state machine based business logic control,peripheral system interface,exception handling & logging,message bus,UI terminal,etc.Through the appli-cation of device automation system,it can effectively solve the problems of production thread mis-operation,data collection,and big data analysis.By linking various subsystems in the production and manufacturing process,the production efficiency and product yield is significantly improved.
semiconductor manufacturing equipment automationSECS/GEMfinite state machineCIM system
万方数据
维普
