首页|基于ATE的运放失调电压测试技术研究

基于ATE的运放失调电压测试技术研究

Research on Test Technology for Offset Voltage of Operational AmplifiersBased on ATE

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输入失调电压是运算放大器电路最关键的参数之一,随着集成电路的发展,高精度运放成为趋势,输入失调电压越来越小,目前绝大部分满足是通过晶圆测试时对其进行激光修调以达到使用要求,因此对芯片测试提出了更高的要求.典型的运放输入失调电压测试采用"被测器件-辅助运放"测试[1],该方法的必要条件是被测运放的正、负输入端及输出端接入辅助环路才能测试;随着集成电路的发展,电流放大电路,其内部放大器的输出接入后级放大器电路,无管脚引出,典型的"被测器件-辅助运放"测试方法无法测试,本文设计了一套信号放大环路方案,基于T861型ATE搭建一套测试系统,解决了只有输入端引出的运放失调电压测试,测试精度可达到0.5uV.
Input offset voltage is one of the most critical parameters of operational amplifier circuits.With the devel-opment of integrated circuits,high-precision operational amplifiers have become a trend,and input offset voltage is decreasing.In most cases,laser trimming is employed during wafer testing to meet usage requirements,posing higher demands on chip testing.The typical method for testing operational amplifier input offset voltage involves a"Device under Test(DUT)-Auxiliary Op-Amp"test setup,where the necessary condition is that the positive and negative input terminals as well as the output terminal of the DUT are connected to the auxiliary loop for testing.However,with the advancement of integrated circuits,circuits such as current amplification circuits have internal amplifier stages without external pins,rendering the typical"DUT-Auxiliary Op-Amp"test method inadequate.This paper proposes a signal amplification loop scheme and designs a testing system based on the T861 ATE to address the testing of offset voltage for operational amplifiers with only input terminals accessible.The proposed system achieves a testing accura-cy of up to 0.5uV.

offset voltagehigh-accuracylaser trimmingdifferential amplification

刘继光、顾玉娣、王征宇、王建超

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中国电子科技集团第五十八研究所

失调电压 高精度 激光修调 差分放大

2024

中国集成电路
中国半导体行业协会

中国集成电路

影响因子:0.144
ISSN:1681-5289
年,卷(期):2024.33(9)