In the process of ion implantation,Beam Glitch or Beam Drift will occur in the doping process due to vari-ous factors such as ignition in the source region and unstable air flow.The defects of the existing interrupt detection and replenishment injection schemes will cause the detection of the beam state in the doping process inaccurate and not timely.And the problems such as the inaccuracy of supplement injection seriously affect the technological level of the injection machine doping,and the qualified rate of the product is also greatly reduced.Now based on the control system,the upgrade design of the control scheme is carried out,and the process verification of the typical Recipe is carried out.Through the process data analysis and judgment,it is determined that the design of the scheme meets the requirements and specifications of the production line.
维普
万方数据