摘要
随着国内数字经济的蓬勃发展,使我国集成电路产业方面面临更高的技术要求,电子级多晶硅作为集成电路的上游端,生产高质量的芯片用电子级多晶硅是未来行业的主流,而在生产过程中产生的副产物(二氯二氢硅、六氯乙硅烷、氯化氢、氢气、四氯化硅),作为电子特气具有很高的利用价值,是集成电路、显示面板、半导体照明、光伏等行业制造过程中不可或缺的关键性材料,是集成电路制造的第二大制造材料[1].本文对副产电子特气及其分离的主要工艺进行了分析,同时对其分类、提纯及用途作了阐述.
Abstract
With the vigorous development of the domestic digital economy,China's integrated circuit industry is facing higher technical requirements,as the upstream end of integrated circuits,the production of high-quality electron-ic-grade polysilicon for chips is the mainstream of the future industry,and by-products from the production process(dichlorodihydrosilane,hexachloroethylsilane,hydrogen chloride,hydrogen,silicon tetrachloride),as an electronic special gas,it has a high utilization value,and is an indispensable key material in the manufacturing process of inte-grated circuits,display panels,semiconductor lighting,photovoltaic and other industries,and is the second largest manufacturing material for integrated circuit manufacturing.
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