Comprehensive utilization of electronic grade polysilicon by-products
With the vigorous development of the domestic digital economy,China's integrated circuit industry is facing higher technical requirements,as the upstream end of integrated circuits,the production of high-quality electron-ic-grade polysilicon for chips is the mainstream of the future industry,and by-products from the production process(dichlorodihydrosilane,hexachloroethylsilane,hydrogen chloride,hydrogen,silicon tetrachloride),as an electronic special gas,it has a high utilization value,and is an indispensable key material in the manufacturing process of inte-grated circuits,display panels,semiconductor lighting,photovoltaic and other industries,and is the second largest manufacturing material for integrated circuit manufacturing.
electronic-grade polysilicon for chipselectronic special gasesby-products
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