半导体设备SECS/GEM通信研究与设计
Research and Design of SECS/GEM Communication for Semiconductor Equipment
周水清 1罗超 1何永平1
作者信息
摘要
SECS/GEM是半导体行业中广泛采用的一个半导体设备通信标准.本文首先介绍了 SECS/GEM标准的制定及行业应用情况,分别说明了 HSMS、SECS-Ⅱ、GEM各个通信标准的数据格式、传输控制、状态转换模型控制方式等;同时,阐述了所设计一套用于半导体设备SECS/GEM标准的软件通信系统.通过实践表明,该通信系统符合SECS/GEM标准,性能良好,满足设备的需求.
Abstract
SECS/GEM is a widely adopted communication standard in the semiconductor industry.This article first introduces the development and industrial applications of the SECS/GEM standard,explaining the data formats,transmission control,and state transition model control methods of the various communication standards including HSMS,SECS-Ⅱ,and GEM.A software communication system for semiconductor equipment based on SECS/GEM has been designed.Practical applications have demonstrated that this communication system conforms to the SECS/GEM standard,exhibits good performance,and meets the requirements of the equipment.
关键词
半导体设备/SECS/GEM/通信接口/设备控制Key words
semiconductor equipment/SECS/GEM/communication interface/device control引用本文复制引用
出版年
2024
NETL
NSTL
万方数据