Research and Design of SECS/GEM Communication for Semiconductor Equipment
SECS/GEM is a widely adopted communication standard in the semiconductor industry.This article first introduces the development and industrial applications of the SECS/GEM standard,explaining the data formats,transmission control,and state transition model control methods of the various communication standards including HSMS,SECS-Ⅱ,and GEM.A software communication system for semiconductor equipment based on SECS/GEM has been designed.Practical applications have demonstrated that this communication system conforms to the SECS/GEM standard,exhibits good performance,and meets the requirements of the equipment.
semiconductor equipmentSECS/GEMcommunication interfacedevice control
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