Optimization Design of Control System for SiC Ion Implanter
In order to optimize and improve the control system of SiC ion implanter,starting from the principle of ion implantater,the basic structural composition of ion implantater is described,and the architecture design of the control system is analyzed and elaborated;Next,we will provide a detailed introduction to the optimization design of several important components in the control system of the SiC ion implantater,including heating optimization design,beam stabilization optimization design,and edge finding optimization design.These components can effectively improve heating efficiency and accuracy,beam stability,and transfer efficiency,making the overall performance of the SiC ion implantater reach an advanced level in the industry.
ion implanterControl SystemSiCmodeloptimization design
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