Design and Application of an SPC Quality Monitoring System for Third-Generation Semiconductors
In the third-generation semiconductor wafer manufacturing process,Statistical Process Control(SPC)plays a crucial role in monitoring process stability and product quality.Based on the basic theory of SPC,combined with the quality control requirements for third-generation semiconductor wafer production,this paper designs and implements an SPC quality monitoring system.Our system is integrated with the Manufacturing Execution Systems(MES)and has been successfully applied in a manufacturing workshop of a wafer fabrication.This successful application validates its feasibility and provides a reference for the planning,design,development,and implementation of SPC system in simi-lar scenarios.
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