第三代半导体SPC质量监控系统设计及应用
Design and Application of an SPC Quality Monitoring System for Third-Generation Semiconductors
曾参 1赵辉良 1谢政廷 1罗超 1易卓 1肖骏 1张炜 1黄浩1
作者信息
摘要
在第三代半导体晶圆制造过程中,统计过程控制(SPC)可对工艺加工过程的稳定性和产品质量起到重要作用.本文基于SPC基本理论,结合第三代半导体晶圆生产过程质量控制的需求,设计实现了一种SPC质量监控系统并实现与制造执行系统(MES)的集成,在某企业晶圆制造车间实现了应用,验证了其可行性,可为类似场景的SPC系统规划、设计开发、实施应用等提供参考.
Abstract
In the third-generation semiconductor wafer manufacturing process,Statistical Process Control(SPC)plays a crucial role in monitoring process stability and product quality.Based on the basic theory of SPC,combined with the quality control requirements for third-generation semiconductor wafer production,this paper designs and implements an SPC quality monitoring system.Our system is integrated with the Manufacturing Execution Systems(MES)and has been successfully applied in a manufacturing workshop of a wafer fabrication.This successful application validates its feasibility and provides a reference for the planning,design,development,and implementation of SPC system in simi-lar scenarios.
关键词
SPC系统/质量监控/系统集成/晶圆制造/系统应用Key words
SPC system/quality monitor/system integration/wafer fabrication/system application引用本文复制引用
出版年
2024
NETL
NSTL
万方数据