首页|High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer

High synchronization absolute distance measurement using a heterodyne and superheterodyne combined interferometer

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We propose an absolute distance measurement method that employs heterodyne and superheterodyne combined inter-ferometers to achieve synchronous detection and demodulation of multiwavelengths.Coarse and fine synthetic wave-lengths are generated by a dual-longitudinal-mode He-Ne laser and four acoustic optical frequency shifters.Further,to improve phase synchronization measurement for multiwavelengths,we analyze the demodulation characteristics of coarse and fine measurement signals and adopt a demodulation method suitable for both signals.Experimental results demonstrate that the proposed method can achieve high-precision synchronous demodulation of multiwavelengths,and standard deviation is 1.7 × 10-5 m in a range of 2 m.

multiwavelengthabsolute distancesuperheterodyne interferometryphase synchronization

殷子淇、李芳妃、孙云科、邹运、王彦、杨宏兴、胡鹏程、付海金、谭久彬

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Center of Ultra-precision Optoelectronic Instrument,Harbin Institute of Technology,Harbin 150080,China

Key Laboratory of Ultra-precision Intelligent Instrumentation[Harbin Institute of Technology],Ministry of Industry and Information Technology,Harbin 150080,China

National Natural Science Foundation of ChinaNational Key Research and Development Program of ChinaNatural Science Foundation of Heilongjiang Province

521755002022YFF0605102LH2019E048

2024

10.3788/COL202422.011204

中国光学快报(英文版)
中国光学学会 中国科学院上海光学精密机械研究所

中国光学快报(英文版)

CSTPCD
影响因子：1.305
ISSN：1671-7694
年,卷(期)：2024.22(1)
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