首页|Simultaneously detecting transversal and longitudinal displacement with the dielectric metasurface
Simultaneously detecting transversal and longitudinal displacement with the dielectric metasurface
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The compact,sensitive,and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging.The metasurface offers a promising solution to develop high-precision displacement metrology.In this work,we proposed and experimentally demonstrated a two-dimensional displacement[XZ]measurement device by a dielectric metasurface.Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interference optical intensity that is generated by the deflected light beams while the metasurface is under linearly polarized incidence.We experimentally demonstrated that displacements down to 5.4 nm along the x-axis and 0.12 μm along the z-axis can be resolved with a 900 μm × 900 μm metasurface.Our work opens up new possibilities to develop a compact high-precision multidimensional displacement sensor.
metasurfacetransversal and longitudinal displacement measurement
张植宇、匡程辉、臧昊峰、鲁拥华、王沛
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Department of Optics and Optical Engineering,University of Science and Technology of China,Hefei 230026,China
Advanced Laser Technology Laboratory of Anhui Province,Hefei 230026,China
国家自然科学基金Technology Domain Fund of 173 ProjectUSTC Center for Micro and Nanoscale Research and Fabrication
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