首页|Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

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Recently,Mach-Zehnder modulators based on thin-film lithium niobate have attracted broad interest for their potential for high modulation bandwidth,low insertion loss,high extinction ratio,and high modulation efficiency.The periodic capac-itively loaded traveling-wave electrode is optimally adopted for ultimate high-performances in this type of modulator.However,such an electrode structure on a silicon substrate still suffers from the velocity mismatch and substrate leakage loss for microwave signals.Here,we introduce a thin-film lithium niobate modulator structure using this periodic capac-itively loaded electrode on a silicon substrate.Backside holes in the silicon substrate are prepared to solve robustly the above difficulties.The fabricated device exhibits an insertion loss of 0.9 dB,a halfwave-voltage-length product of 2.18 V·cm,and an ultra-wide bandwidth well exceeding 67 GHz for a 10-mm-long device.Data transmissions with rates up to 112 Gb/s are demonstrated.The proposed structure and fabrication strategy are compatible for other types of monolithic and heterogeneous integrated thin-film lithium niobate modulators on a silicon substrate.

lithium niobateelectro-optic modulatorhigh bandwidthbackside holesrobust structure

王迈、祁璐、王浩华、阮子良、陈耿鑫、陈斌、龚胜琪、陈楷旋、刘柳

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State Key Laboratory of Extreme Photonics and Instrumentation,College of Optical Science and Engineering,International Research Center for Advanced Photonics,Zhejiang University,Hangzhou 310058,China

Guangdong Provincial Key Laboratory of Optical Information Materials and Technology,South China Academy of Advanced Optoelectronics,South China Normal University,Higher-Education Mega-Center,Guangzhou 510006,China

National Center for International Research on Green Optoelectronics,South China Normal University,Guangzhou 510006,China

Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging,Intelligent Optics & Photonics Research Center,Jiaxing Research Institute,Zhejiang University,Jiaxing 314000,China

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National Natural Science Foundation of China(NSFC)National Natural Science Foundation of China(NSFC)National Natural Science Foundation of China(NSFC)Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang

6213501262105107619611460032021R01001

2024

10.3788/COL202422.050601

中国光学快报(英文版)
中国光学学会 中国科学院上海光学精密机械研究所

中国光学快报(英文版)

CSTPCD
影响因子：1.305
ISSN：1671-7694
年,卷(期)：2024.22(5)