Double-cliff-layer uni-traveling-carrier photodiode with high responsivity and ultra-broad bandwidth

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外文摘要：A novel backside-illuminated double-cliff-layer uni-traveling-carrier[DCL-UTC]photodiode with both high responsivity and ultra-broad bandwidth is designed and demonstrated.A thick absorption layer is adopted for high responsivity,and a depletion region with double cliff layers is proposed to alleviate the space charge effect and maintain overshoot electron velocity under large photocurrents.In addition,inductive coplanar waveguide electrodes are employed to enhance the frequency response performance.The 6-pm-diameter photodiode exhibits a high responsivity of 0.51 A/W and a large 3-dB bandwidth of 102 GHz.A high RF output power of 2.7 dBm is recorded at 100 GHz.

外文关键词：

uni-traveling-carrier photodiodehigh responsivitybroad bandwidth

作者：

韩亚茹、田雨欣、熊兵、孙长征、王健、郝智彪、韩彦军、汪莱、李洪涛、甘霖、罗毅

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作者单位：

Beijing National Research Center for Information Science and Technology[BNRist],Department of Electronic Engineering,Tsinghua University,Beijing 100084,China

Flexible Intelligent Optoelectronic Device and Technology Center,Institute of Flexible Electronics Technology of THU,Jiaxing 314006,China

基金：

National Key R&D Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaCollaborative Innovation Center of Solid-State Lighting and Energy-Saving Electronics

项目编号：

2022YFB280300262235005621278146222540561975093619278116199144361974080

出版年：

2024

DOI：

10.3788/COL202422.052501

中国光学快报(英文版)

中国光学学会中国科学院上海光学精密机械研究所

中国光学快报(英文版)

CSTPCD

影响因子：1.305

ISSN：1671-7694

年,卷(期)：2024.22(5)