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A simple fabrication method of germanium-based metasurfaces

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In this work,a simple fabrication method of germanium-based metasurfaces is proposed,where the deposited Al2O3 layer with high selectivity is chosen as the hard mask and retained after the dry etching process.The simulation and experimental characterization results verify the feasibility of the fabrication method.The experimental study on the fabrication methods of germanium-based metasurfaces is very significant as the meta-atoms with a higher refractive index can achieve O to 2πtransmission phase variation with a smaller period under the same thickness-to-period ratio,which is consistent with the requirement of the period miniaturization in some cases.

metasurfacesperiod miniaturizationrefractive index

单冬至、高劲松、徐念喜、宋乃涛、魏鸿达、李强、赵毅、刘海、孙侨、姜肖楠、李超、张志宇

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Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China

Jilin Provincial Key Laboratory of Advanced Optoelectronic Equipment and Instrument Manufacturing Technology,Changchun 130033,China

2024

10.3788/COL202422.073602

中国光学快报(英文版)
中国光学学会 中国科学院上海光学精密机械研究所

中国光学快报(英文版)

CSTPCD
影响因子：1.305
ISSN：1671-7694
年,卷(期)：2024.22(7)