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连续激光色谱合束高陡度薄膜设计及制备

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基于高陡度双色膜的激光合束是在单路连续激光输出能量达到瓶颈时,实现更高功率激光输出的有效技术方案之一。从设计、精密制备、测试表征的角度系统性地分析了膜系结构的优化设计和精密制备策略,制备了具有更高陡度、反射率、透过率、吸收率等性能的高陡度双色膜。对比了法布里-珀罗腔叠加带通和反射带叠加长波通基础膜系结构在透过率、反射率、陡度等光谱性能和膜层电场分布方面的差异,反射带叠加长波通膜系结构更适用于高功率连续激光的低吸收传输。基于双离子束溅射薄膜沉积设备,采用加权宽光谱监控方法进行了制备,采用分光光度计对制备样品进行了测试,并根据测试结果进行了误差分析。制备的高陡度双色膜陡度达到8nm,1060 nm和1080 nm激光的合束效率达到99%以上,合束输出7。16 kW连续激光180 s时,双色膜温升不超过4 ℃。
Design and Preparation of Ultra-Steep Dichroic Coating for Continuous Laser Beam Combination
Objective The high-power continuous laser is in urgent demand in military and industrial fields,and it is an important technical support for national defense and economic development.Because it is limited by nonlinear effects,mode instability,and other problems,the output power of single-mode fiber lasers has a specific limitation.To improve the output power of the laser,researchers have proposed a series of laser power enhancement technology routes,such as spectral combination and dichromatic combination.By combining multiple single-path lasers to output laser,higher laser power can be obtained while maintaining good beam quality.Therefore,the combination scheme becomes the key to realize ultra-high laser power output.The dichroic mirror combination technology scheme based on the spectral characteristics of the dichroic film has become one of the main technical routes for high-power continuous laser synthesis output owing to its advantages of stability,high combination efficiency,and easy integration at low cost.Because of the spectral characteristics of the dichromic film,it can simultaneously transmit and reflect two beams with different wavelengths,and by adjusting the incidence angles of the two beams,it can realize the coincidence of the transmitted and reflected beams to achieve the combining effect of two beams.In addition,the higher the transmittance and reflectivity at the transmission and reflection bands of the dichromic film,the smaller is the loss of laser energy in the beam combination process,and the higher is the achieved beam combination efficiency.Methods The differences in spectral properties,such as spectral transmittance,reflectance,and steepness,and the electric field distribution of the film layer between the Fabry-Perot cavity superposition and the long-wavelength-pass basic film structures are compared.The long-wavelength-pass film structure is more suitable for the high-power continuous laser low-absorption transmission.Based on the dual ion beam sputtering thin film deposition equipment,the preparation is carried out using the weighted broad spectrum monitoring method,and the prepared samples are tested using a spectrophotometer.The errors are analyzed based on the test results.Results and Discussions Figure 7 shows the spectral matching of the transmittance spectra of the dichromic film using the layer-by-layer inversion function of the OptiRE software.Among them,the transmittance spectrum of the first film layer is poorly matched because the spectral transmittance curve contains limited information.Then,because of the self-compensating effect of the broad spectrum monitoring,the target is gradually corrected during the deposition process of the film layer,so that the matching of the measured and theoretical design spectra improves.In addition,as shown in Fig.8,the thickness of the high refractive index material is generally positively shifted,and the thickness of the low refractive index material is are generally negatively shifted.The main reason for the formation of this phenomenon is the self-compensating effect of the broad spectrum monitoring.Aiming at the design transmittance spectrum,the thickness errors of high and low refractive index films are staggered with each other when the film is adjusted repeatedly.At the same time,according to the inversed deposition rate distributions of the high and low refractive index materials,the deposition rates from layer 13 to layer 46 are stable.The rate gradients of the first few film layers are from the state-stabilizing process at the beginning of ion beam output of double ion beam sputtering equipment.In layer 47,the film layer sensitivity is increased.At this time,to achieve the spectral matching,the broad band spectral monitoring is more active,the overall spectral changes are concentrated near the transition band,and the overall rate fluctuation becomes larger.Conclusions The optimized design of the coating structure and the strategy of precision preparation are systematically analyzed from the perspectives of design,precision preparation,and test characterization.This allows the achievement of higher steepness,reflectivity,transmittance,absorption,and other properties of the high-steepness dichromatic coating.The long-wavelength-pass film structure is more suitable for the high-power continuous laser low-absorption transmission.The steepness of the designed and prepared high-steepness dichromatic film is 8 nm;the 1060 nm and 1080 nm laser beam combining efficiency reaches more than 99%;and the temperature rise of the dichromatic film is less than 4 ℃ when the combined continuous laser output power reaches 7.16 kW in 180 s.This is of great significance for the design and precision preparation of complex film systems represented by high-steepness dichromatic films.

continuous laserlaser beam combinationhigh steepnessdichroic filmsprecision manufacture

陆叶盛、王胭脂、陈宇、朱晔新、邵建达

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中国科学院上海光学精密机械研究所薄膜光学实验室,上海 201800

连续激光 激光合束 高陡度 双色膜 精密制备

国家重点研发计划中国科学院青年创新促进会项目中国博士后科学基金

2022YFB3605900Y20210722022M723268

2024

中国激光
中国光学学会 中科院上海光机所

中国激光

CSTPCD北大核心
影响因子:2.204
ISSN:0258-7025
年,卷(期):2024.51(11)