首页|基于光热反射的高功率半导体激光器输出腔面温度研究方法

基于光热反射的高功率半导体激光器输出腔面温度研究方法

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半导体激光器输出腔面温度过高是导致腔面失效的关键因素,该温度直接决定了激光器的最高输出功率和可靠性。由于半导体激光器输出腔面尺寸在微米量级,故温度测量系统需要具有亚微米量级的空间分辨率,以获取输出腔面处的温度分布信息。采用光热反射成像技术建立了空间分辨率优于0。5 μm的温度测量系统,开展了半导体激光器输出腔面的测温研究。结果表明,半导体激光器输出腔面温度沿慢轴方向的分布极不均匀;在10 A驱动电流下,条宽为100 μm的975 nm高功率半导体激光器输出腔面外延层不同位置处的最大温差超过7 ℃,且输出腔面处量子阱层的最高温度(55 ℃)比结温(44。9 ℃)高10。1℃。研究结果有助于精确测量半导体激光器输出腔面的温度分布,对高功率半导体激光器的设计、测试、光学灾变损伤和失效分析等具有重要意义。
Output Facet Temperature of High-Power Semiconductor Lasers Using Optical-Thermal Reflection Method
Objective Semiconductor lasers have been widely used in industrial,medical,and other fields owing to their high electro-optical conversion efficiency,wide spectrum,and high power-to-volume ratio characteristics.However,as the application field expanded,higher power and reliability requirements have been stated.When manufacturing a high-power semiconductor laser,catastrophic optical mirror damage(COMD)is a key factor limiting the output power and reliability characteristics.COMD occurs due to a local temperature rise at the facet,which exceeds the material damage threshold,and it denotes the irreversible physical damage inflicted on the facet.Note that the occurrence of COMD is closely related to the output facet temperature;thus,accurately measuring the temperature and plotting its distribution are crucial for assessing the failure characteristics of high-power semiconductor lasers.Methods This study is based on the optical thermal reflection method used to construct a semiconductor laser output surface temperature measurement system.Accordingly,the distribution characteristics of the output surface temperature are studied.First,the thermal reflection coefficient of the output facet material used in the semiconductor laser is measured,based on which the measurement system is calibrated.Second,the lock-in method is used to improve the signal-to-noise ratio of the measurement system by increasing the number of image acquisitions.Finally,the output facet temperatures are measured under different operating currents,and the temperature information along the fast and slow axes is extracted and analyzed.Results and Discussions The thermal reflection coefficient of the active region is 5.06 × 10-4[Fig.3(a)],and that of the substrate is 6.03 × 10-4[Fig.3(b)].After 1000 iterations,the amplitude fluctuation of the thermal reflection signal tends to a smooth curve,causing a temperature fluctuation of less than 0.4 ℃(Fig.6).The output facet temperature under the 1-10 A current is measured;the output facet temperature of the active region of the semiconductor laser increases with an increase in the injection current(Fig.8).The output facet temperature of the quantum well layer exhibits strong non-uniformity along the slow axis.At 10 A,the maximum temperature difference at the output facet is approximately 7.5 ℃.However,at 1 A,the maximum difference exceeds 3 ℃(Fig.9).The output facet temperatures of the quantum well region under currents of 2,4,6,8,and 10 A are 1.4,3.1,4.6,6.9,and 8.7 ℃ higher than the junction temperature,respectively.In the region with an approximate thickness of 1.3 μm at both sides of the quantum well,the output facet temperature is higher than the junction temperature.However,in other regions,the output facet temperature is lower than the junction temperature(Fig.11).Conclusions This article presents a study on the high-resolution measurement of the temperature distribution at the semiconductor laser output facet using the optical thermal reflection method.The temperature distribution information from the output facet of the semiconductor laser is collected under working currents of 1-10 A.The results indicate that the measurement method presented in this study can distinguish small temperature variations at the output facet of the semiconductor laser.Moreover,it is observed that the temperature distribution at the output facet of the semiconductor laser exhibits strong non-uniformity along the slow axis,primarily due to heat generation from light absorption and non-radiative recombination occurring at the facet defects.The highest temperature is observed near the quantum well layer at the output facet,which is consistent with the fact that COMD usually occurs in this region,indicating that abnormal temperatures exceeding the damage threshold are the direct cause of COMD failure in semiconductor lasers.The research method and results presented in this study contribute to obtaining a better understanding of the heat generation mechanism at the output facet of semiconductor lasers,which hold significant practical value for optimizing their design for improving their output performance and reliability.

laserssemiconductor lasersoptical thermal reflectionfacet temperaturecatastrophic optical mirror damage

徐梓棒、苗新莲、刘育衔、兰宇、赵宇亮、张翔、杨国文、袁孝

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苏州大学光电科学与工程学院,江苏苏州 215006

江苏省先进光学制造技术重点实验室,江苏苏州 215006

教育部现代光学技术重点实验室,江苏苏州 215006

中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,陕西西安 710119

度亘核芯光电技术(苏州)有限公司,江苏苏州 215000

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激光器 半导体激光器 光热反射 腔面温度 灾变性光学镜面损伤

2024

中国激光
中国光学学会 中科院上海光机所

中国激光

CSTPCD北大核心
影响因子:2.204
ISSN:0258-7025
年,卷(期):2024.51(13)