Modeling and Simulation of Abrasive Flow in Chemical Mechanical Polishing Using Discrete Element Method
According to coupling computational fluid dynamics and computational granular media mechanics method, the motion of abrasive flow in CMP with composite particles was simulated using discrete element method. With PFC3D software, a two-phase flow model that predicted the kinematics and trajectory of the abrasive particles was built herein,two verification simulations were conducted to demonstrate the capability of the current method to solve nano-size two-phase flow problems. Finally, the CMP geometry simulations were conducted, some phenomenon observed in the experiments were explained.
discrete element methodchemical mechanical polishing(CMP)abrasive flownumerical simulationcomposite particle
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NSTL
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维普
