Reliability Modeling and Analysis of Micro Accelerometers under Multi-load Environments
A reliability estimation model for micro-electro-mechanical system(MEMS)micro ac-celerometer was proposed based on the total probability theory under a multi-load environment,ad-dressing issues related to sensitive structural fractures and material fatigue degradation.The model combined homogeneous Poisson processes and Wiener degradation processes to characterize the num-ber of impact loads acting on the micro accelerometers within a unit time and the fatigue degradation process of the device under vibrational loads.The model accomplished reliability modeling for the mi-cro accelerometers under generalized extreme impacts,generalized δ-impacts and generalized mixed impact conditions.The reliabilities of the three models were compared and analyzed with time,and the results of reliability calculations from the generalized mixed impact model offer more valuable in-sights.Furthermore,a parameter sensitivity analysis of generalized mixed impact model shows that impact intensity and impact times have significant influences on the reliability of micro accelerometers.
micro accelerometermulti-load environmentreliabilitytotal probability theory
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