Research on the Oxidation Process of Topcon Solar Cells
As the efficiency of P-type cells is close to the limit efficiency,Topcon cells will are the high-efficiency cells with the highest compatibility with the current PERC production line.In this paper,the window verification of the temperature,time and oxygen flow rate of large oxygen oxidation is carried out,and through the square resistance,ECV curve and electrical data,it is concluded that the oxygen oxidation temperature has the greatest impact on the ECV curve,followed by time,and the oxygen is basically used as excess gas,which has little effect on the oxidation of large oxygen.In the subsequent efficiency improvement process,it is still necessary to match and optimize the boron expansion,printing paste and sintering temperature to achieve the purpose of efficiency improvement.
topcon solar cellsoxygen oxidation processhigh temperaturesECV curves