Research progress on flexible,electrically driven microactuators
Recently,with the rapid development of manufacturing technology of micro/nanofilms,new electronically controlled micro/nanoactuators have emerged.Micro/nanoactuators have been widely used in microrobots,biomedical devices,and smart metamaterials due to their advantages of small size,direct control via integrated circuits,and mass production.This review highlights breakthroughs in the field of electronically controlled thin-film micro/nanoactuators.First,the physical and chemical actuation mechanisms of electronically controlled thin films are elaborated.Further,different types of electrically actuated thin-film materials,especially emerging nanofilms,are systematically summarized.In addition,their applications in microrobotics and other related fields are listed.Finally,critical problems and future developments of the micro/nanoactuators are discussed.
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