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Scanning near-field acoustic microscope and its application

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Scanning near-field acoustic microscope (SNAM) combines the ultrasonic detection technology with scanning near-field microscopy.The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector.The resolution of SNAM can reach to nanometer scale.First,two typical SNAMs,scanning electron acoustic microscope and scanning probe acoustic microscope,will be introduced in this paper.The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported,together with some recent results from this homemade SNAM.

scanning near-field acoustic microscopeultrasonic detection technologyscanning probe microscopy

XU Ping、CAI Wei、WANG RongMing

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Key Laboratory of Micro-nano Measurement-Manipulation and Physics(Ministry of Education)

Department of Physics, Beihang University, Beijing 100191, China

国家自然科学基金国家自然科学基金北京市自然科学基金高等学校博士学科点专项科研基金

5097101110874006110202520091102110038

2011

10.1007/s11431-010-4147-5

中国科学:技术科学(英文版)
中国科学院

中国科学:技术科学(英文版)

SCIEI
影响因子：1.056
ISSN：1674-7321
年,卷(期)：2011.54(1)
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