首页|Femtosecond laser-induced periodic surface structures on hard and brittle materials

Femtosecond laser-induced periodic surface structures on hard and brittle materials

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Hard and brittle materials have high hardness,excellent optical stability,chemical stability,and high thermal stability.Hence,they have huge application potential in various fields,such as optical components,substrate materials,and quantum information,especially under harsh conditions,such as high temperatures and high pressures.Femtosecond laser direct writing technology has greatly promoted the development of femtosecond laser-induced periodic surface structure(Fs-LIPSS or LIPSS by a femtosecond laser)applications of hard and brittle materials due to its high precision,controllability,and three-dimensional processing ability.Thus far,LIPSSs have been widely used in material surface treatment,optoelectronic devices,and micro-mechanics.However,a consensus has not been reached regarding the formation mechanism of LIPSSs on hard and brittle materials.In this paper,three widely accepted LIPSS formation mechanisms are introduced,and the characteristics and ap-plications of LIPSSs on diamonds,silicon,silicon carbide,and fused silica surfaces in recent years are summarized.In addition,the application prospects and challenges of LIPSSs on hard and brittle materials by a femtosecond laser are discussed.

laser-induced periodic surface structureshard and brittle materialsfemtosecond laser

ZHAO GuoXu、WANG Gong、LI YunFei、WANG Lei、LIAN YuDong、YU Yu、ZHAO Hui、WANG YuLei、LU ZhiWei

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Center for Advanced Laser Technology,Hebei University of Technology,Tianjin 300401,China

Hebei Key Laboratory of Advanced Laser Technology and Equipment,Tianjin 300401,China

State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China

School of Information and Electrical Engineering,Hebei University of Engineering,Handan 056038,China

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National Natural Science Foundation of ChinaNatural Science Research Foundation of Hebei University of TechnologyNatural Science Foundation of Hebei ProvinceNatural Science Foundation of Hebei ProvinceFunding Projects for the Introduction of Overseas Staff of Hebei ProvinceKey Laboratory Fund Project

62004059BKYXX2203F2021202047F2021202002C202103342021JCJQLB055004

2024

10.1007/s11431-022-2327-8

中国科学:技术科学(英文版)
中国科学院

中国科学:技术科学(英文版)

CSTPCDEI
影响因子：1.056
ISSN：1674-7321
年,卷(期)：2024.67(1)
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