Spatial light modulation for femtosecond laser manufacturing:Current developments and challenges

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外文摘要：Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various applications.It enables multidimensional and dynamic modulation of the laser beam,which significantly improves the processing efficiency,accuracy,and flexibility,and presents wider prospects over traditional mechanical technologies for machining three-dimen-sional,hard,brittle,or transparent materials.In this review,we introduce:(1)The role of spatial light modulation technology in the development of femtosecond laser manufacturing;(2)the structured light generated by spatial light modulation and its generation methods;and(3)representative applications of spatial-light-modulated femtosecond laser manufacturing,including aberration correction,parallel processing,focal field engineering,and polarization control.Finally,we summarize the present challenges in the field and possible future research.

外文关键词：

femtosecond laser manufacturingspatial light modulationstructured lightaberration correctionparallel processingfocal field engineeringpolarization control

作者：

ZANG Xue、LIU ZiTing、XU YiShi、WANG Yi、WANG Qing、LI ZhenZe、WANG Lei

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作者单位：

State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China

State Key Laboratory of Precision Measurement and Instruments,Department of Precision Instrument,Tsinghua University,Beijing 100084,China

基金：

National Key R&D Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNatural Science Foundation of Jilin ProvinceEducation Department of Jilin Province

项目编号：

2021YFB280200061827826621750866213101820220101107JCJJKH20221003KJ

出版年：

2024

DOI：

10.1007/s11431-023-2420-x

中国科学:技术科学(英文版)

中国科学院

中国科学:技术科学(英文版)

CSTPCDEI

影响因子：1.056

ISSN：1674-7321

年,卷(期)：2024.67(1)

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