In-situ analysis of laser-induced breakdown spectra for online monitoring of femtosecond laser machining of sapphire

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外文摘要：Laser-induced breakdown spectroscopy(LIBS)is widely used for elemental analysis.However,its application for monitoring and analyzing a laser machining process by examining the changes in spectral information warrants further investigation.In this study,we investigate the effect of laser parameters on the spectra,variations in the time-resolved plasma emission spectra,and the relationship between the morphology of craters and plasma plume evolution during the femtosecond(fs)laser ablation of sapphire.The Boltzmann plot method and Stark's broadening model are employed to estimate the temporal temperature and electron density of the plasma plume,revealing the process of plasma evolution.This study aims to demonstrate the feasibility of LIBS for online monitoring of laser processing through experimental data and theoretical explanations.

外文关键词：

laser-induced breakdown spectroscopyplasma plumeonline monitoringsapphire

作者：

SHANGGUAN ShiYong、ZHANG JianGuo、LI ZhanZhu、SHI Wei、WANG WenKe、QI DongFeng、ZHENG HongYu

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作者单位：

Center for Advanced Laser Manufacturing(CALM),Shandong University of Technology,Zibo 255000,China

基金：

National Key R&D Program of ChinaNational Key R&D Program of ChinaNatural Science Foundation of ShandongNatural Science Foundation of ShandongNatural Science Foundation of Zhejiang

项目编号：

2022YFB46004022022YFE0199100ZR2022MF030ZR2020ME164LY21F050002

出版年：

2024

DOI：

10.1007/s11431-023-2499-0

中国科学:技术科学(英文版)

中国科学院

中国科学:技术科学(英文版)

CSTPCDEI

影响因子：1.056

ISSN：1674-7321

年,卷(期)：2024.67(1)

参考文献量39