Abstract
Laser-induced breakdown spectroscopy(LIBS)is widely used for elemental analysis.However,its application for monitoring and analyzing a laser machining process by examining the changes in spectral information warrants further investigation.In this study,we investigate the effect of laser parameters on the spectra,variations in the time-resolved plasma emission spectra,and the relationship between the morphology of craters and plasma plume evolution during the femtosecond(fs)laser ablation of sapphire.The Boltzmann plot method and Stark's broadening model are employed to estimate the temporal temperature and electron density of the plasma plume,revealing the process of plasma evolution.This study aims to demonstrate the feasibility of LIBS for online monitoring of laser processing through experimental data and theoretical explanations.
基金项目
National Key R&D Program of China(2022YFB4600402)
National Key R&D Program of China(2022YFE0199100)
Natural Science Foundation of Shandong(ZR2022MF030)
Natural Science Foundation of Shandong(ZR2020ME164)
Natural Science Foundation of Zhejiang(LY21F050002)
维普
万方数据