首页|Flexible multilayer MEMS coils and their application in energy harvesters

Flexible multilayer MEMS coils and their application in energy harvesters

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Electromagnetic vibration energy harvesters are promising for the power supply of wireless sensor nodes,small electronic devices,and wearable electronics.Conventional electromagnetic harvesters usually increase output by increasing the size of coils and magnets,limiting the improvement of energy conversion efficiency and power density.In this study,multilayer microelectromechanical system(MEMS)coils were prepared using flexible electronics,and their high integration performance in arbitrary space was utilized to greatly improve the utilization of the space magnetic field by the electromagnetic harvester.The core magnet of the generator was magnetically balanced to achieve levitation,which improved the sensitivity and reduced fatigue damage compared with traditional spring structures.The wound coils on the top and bottom of the magnet and the flexible coils on the sides worked together to improve the energy effiiciency and output of the devices.The output performance of the device with different number distributions was simulated using mathematical models to obtain the optimal structural parameters.The results show that by introducing flexible multilayer MEMS coils on the side surface of the energy harvester,the open-circuit voltage of the energy generators increased from 7 to 10 V by more than 43％.Flexible multilayer MEMS coils can enhance energy conversion rates and possess compact dimensions,making them suitable for integration onto complex surfaces.After the vibration energy harvesting system testing,the maximum peak power of the harvester was 7.1 mW at an acceleration of 1 g and a resonant frequency of 11 Hz with a resistor of 3.5 kΩ internal resistance.Moreover,a 470 μF capacitor can be charged to 3.5 V within 10 s to drive a hygrothermograph to work for more than 80 s and can supply a light bulb continuously.This strategy shows the great potential of vibration-energy-driven electromagnetic generators for powering small electronics in limited spaces.

electromagnetic harvestermechanical energy harvestingmultilayer MEMS coilsmagnetic levitationoverall space magnetic fieldflexible planar coils

ZHANG Jie、HOU XiaoJuan、QIAN Shuo、BI XiaoXue、HU DongXu、LIU JianJun、GENG WenPing、MU JiLiang、HE Jian、CHOU XiuJian

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Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyuan 030051,China

School of Software,North University of China,Taiyuan 030051,China

国家重点研发计划国家自然科学基金国家自然科学基金国家自然科学基金Fundamental Research Program of Shanxi ProvinceFundamental Research Program of Shanxi Province

2019YFE01203006217141452175554522056082021030212305920210302124610

2024

10.1007/s11431-023-2474-9

中国科学:技术科学(英文版)
中国科学院

中国科学:技术科学(英文版)

CSTPCDEI
影响因子：1.056
ISSN：1674-7321
年,卷(期)：2024.67(4)
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