Six million Q factor micro fused silica shell resonator with teeth-like tines released by femtosecond laser-assisted chemical etching

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外文摘要：The quality factor(Q factor)is a crucial performance parameter for resonators.In this paper,a novel release method for high-quality micro fused silica shell resonators with teeth-like tines with good surface morphology is proposed.This method is based on femtosecond laser-assisted chemical etching.First,the optimal energy range of femtosecond laser modification is obtained through mechanism analysis.Second,the optimal parameters for a straight line and arc pattern are determined by optimizing the average output power,processing speed,and processing spacing.The results demonstrate why edge breakage in rounded corners is easy under different parameters.Finally,according to these conclusions,the processing is performed on a micro fused silica shell resonator with a Q factor exceeding 6 million.In addition,subsurface damage is rare throughout the fabrication process,and the surface roughness of the released cross section reaches the nanometer level.The improved Q factor helps suppress me-chanical thermal noise and reduce zero bias and zero bias drift,constituting the primary method for enhancing the performance of the resonant gyroscope.

外文关键词：

micro hemispherical resonatorfused silicalaser-assisted chemical etchingquality factor

作者：

ZHAO Tao、SHI Yan、LU Kun、XI Xiang、WU XueZhong、XIAO DingBang

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作者单位：

College of Intelligence Science and Engineering,National University of Defense Technology,Changsha 410073,China

基金：

National Natural Science Foundation of China Regional Innovation and Development Joint Fund Key Support ProjectNational Natural Science Foundation of ChinaNational Natural Science Foundation of China

项目编号：

U21A205056220426152205613

出版年：

2024

DOI：

10.1007/s11431-023-2652-9

中国科学:技术科学(英文版)

中国科学院

中国科学:技术科学(英文版)

CSTPCDEI

影响因子：1.056

ISSN：1674-7321

年,卷(期)：2024.67(6)