Langasite-based SAW high-temperature vibration sensor with temperature decoupling

ZHANG Juan ¹CHENG WenHua ²WANG Hao ²ZHANG Lei ²LI XiangRong ²MA HongShuai ²PANG JunQi ²TAN QiuLin²

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作者信息

1. State Key Laboratory of Dynamic Measurement Technology North University of China,Taiyuan 030051,China;Department of Mechanical Engineering,Taiyuan Institute of Technology,Taiyuan 030008,China
2. State Key Laboratory of Dynamic Measurement Technology North University of China,Taiyuan 030051,China
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Abstract

Monitoring high-temperature vibrations is critical in aerospace engineering,industrial manufacturing,and energy production,where harsh conditions necessitate robust vibration sensors for detecting anomalous signals.However,the accuracy of such sensors is often compromised by crosstalk between temperature and vibration signals.This study introduces a high-temperature vibration sensor based on langasite(LGS)surface acoustic wave(SAW)technology,designed to withstand temperatures up to 500℃.The sensor demonstrates high sensitivity,ranging from 12.54 kHz/g at 25℃ to 15.63 kHz/g at 500℃.A comprehensive mechanical and electrical coupling model for the SAW vibration sensor was developed by integrating theoretical equations with numerical simulations to optimize the sensor's performance.Additionally,a novel decoupling algorithm for temperature and vibration was established,achieving thermomechanical decoupling with precise vibration parameters.Experimental results indicated a maximum relative deviation of 4.67％for the algorithm.In conclusion,the proposed LGS SAW vibration sensor emerges as a promising solution for the accurate detection of multiple parameters in high-temperature vibration monitoring.

Key words

high temperature/langasite(LGS)/surface acoustic wave(SAW)/piezoelectric vibration sensor/temperature decoupling

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基金项目

National Natural Science Foundation of China(U1837209)

National Natural Science Foundation of China(52105594)

Fundamental Research Program of Shanxi Province(20210302124274)

Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi(2023L361)

Outstanding Young Talents Support Plan of Shanxi Province()

Young Sanjin Scholar Distinguished Professor Plan of Shanxi Province()

Innovative Research Group Project of the National Natural Science Foundation of China(51821003)

Shanxi'1331 Project'Key Subjects Construction()

出版年

2024

中国科学:技术科学(英文版)

中国科学院

中国科学:技术科学(英文版)

CSTPCDEI

影响因子：1.056

ISSN：1674-7321

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