Langasite-based SAW high-temperature vibration sensor with temperature decoupling

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外文摘要：Monitoring high-temperature vibrations is critical in aerospace engineering,industrial manufacturing,and energy production,where harsh conditions necessitate robust vibration sensors for detecting anomalous signals.However,the accuracy of such sensors is often compromised by crosstalk between temperature and vibration signals.This study introduces a high-temperature vibration sensor based on langasite(LGS)surface acoustic wave(SAW)technology,designed to withstand temperatures up to 500℃.The sensor demonstrates high sensitivity,ranging from 12.54 kHz/g at 25℃ to 15.63 kHz/g at 500℃.A comprehensive mechanical and electrical coupling model for the SAW vibration sensor was developed by integrating theoretical equations with numerical simulations to optimize the sensor's performance.Additionally,a novel decoupling algorithm for temperature and vibration was established,achieving thermomechanical decoupling with precise vibration parameters.Experimental results indicated a maximum relative deviation of 4.67％for the algorithm.In conclusion,the proposed LGS SAW vibration sensor emerges as a promising solution for the accurate detection of multiple parameters in high-temperature vibration monitoring.

外文关键词：

high temperaturelangasite(LGS)surface acoustic wave(SAW)piezoelectric vibration sensortemperature decoupling

作者：

ZHANG Juan、CHENG WenHua、WANG Hao、ZHANG Lei、LI XiangRong、MA HongShuai、PANG JunQi、TAN QiuLin

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作者单位：

State Key Laboratory of Dynamic Measurement Technology North University of China,Taiyuan 030051,China

Department of Mechanical Engineering,Taiyuan Institute of Technology,Taiyuan 030008,China

基金：

National Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaFundamental Research Program of Shanxi ProvinceScientific and Technological Innovation Programs of Higher Education Institutions in ShanxiOutstanding Young Talents Support Plan of Shanxi ProvinceYoung Sanjin Scholar Distinguished Professor Plan of Shanxi ProvinceInnovative Research Group Project of the National Natural Science Foundation of ChinaShanxi'1331 Project'Key Subjects Construction

项目编号：

U183720952105594202103021242742023L36151821003

出版年：

2024

DOI：

10.1007/s11431-023-2563-4

中国科学:技术科学(英文版)

中国科学院

中国科学:技术科学(英文版)

CSTPCDEI

影响因子：1.056

ISSN：1674-7321

年,卷(期)：2024.67(6)