Development frontier and future challenges of lithography machines for integrated circuit manufacturing
The lithography machine is the most core high-end equipment in integrated circuit(IC)manufacturing,and it has challenged the limits of ultra-precision manufacturing equipment continuously over its 60-year development history.It has propelled the constant advancement of Moore's Law and the rapid development of the information age,holding extremely important strategic significance for technological progress,the national economy,and national security.This paper first elucidates the central role of the lithography machine in IC manufacturing equipment,introduces the basic principles of lithography,and traces the development trajectory of lithography machines from the 1960s to the present.The key technologies and severe technical challenges in lithography machines are discussed by focusing on the three core components.Based on these findings,this paper looks forward to future trends and directions in the development of lithography machines.
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