zinc-oxo clusterC-F crosslinkingextreme ultra-violet lithographyradiation chemistrylithography mechanism
zinc-oxo cluster C-F crosslinking extreme ultra-violet lithography radiation chemistry lithography mechanism
National Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaLiaoning Binhai LaboratoryFundamental Research Funds for the Central Universities
2192580222338005LBLB-2023-03DUT22LAB601
2024