无真空、低成本Mist-CVD外延制备高质量单晶NiO/Ga2O3 p-n异质结与器件

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中文摘要：在氧化镓(Ga2O3)材料p型掺杂困难的背景下,Ga2O3 p-n异质结器件在氧化镓器件的应用中起着重要作用.因此,寻找一种高效、经济的制备方法制备Ga2O3异质结对器件应用具有重要意义.在这项工作中,我们成功基于低成本、无真空的雾化学气相沉积(Mist-CVD)外延制备了单晶氧化镍(NiO)和β-Ga2O3异质结.其中,NiO(111)和β-Ga2O3(-201)的XRD摇摆曲线半高宽分别为0.077°和0.807°.NiO与β-Ga2O3之间的能带表现为Ⅱ型异质结构.基于此异质结,我们制备了准垂直器件,器件具有明显的p-n结整流特性,反向击穿电压为117V.本工作为β-Ga2O3异质p-n结的制备提供了一种低成本、高质量的方法.

外文标题：High-quality crystalline NiO/β-Ga2O3 p-n heterojunctions grown by the low-cost and vacuum-free mist-CVD for device applications

外文摘要：Gallium oxide(Ga2O3)p-n heterojunctions play an important role in addressing the difficulties in Ga2O3 p-type doping.Therefore,an efficient and economical fabri-cation method needs to be established to create single-crystal Ga2O3 heterojunctions for device applications.In this work,we successfully achieved epitaxial growth of single-crystal nickel oxide(NiO)and β-Ga2O3 heterojunctions based on the low-cost and vacuum-free mist chemical-vapor deposition.The full width at half maximum of the X-ray diffraction rocking curves of NiO(111)and β-Ga2O3(-201)reached 0.077° and 0.807°,respectively.The energy band between NiO and β-Ga2O3 has a Type Ⅱ heterojunction.Finally,we pre-pared a quasi-vertical diode based on the NiO/β-Ga2O3 het-erojunction,which exhibits obvious rectification characteristics of the p-n junction and provides a reverse breakdown voltage of 117 V.This work proposes a low-cost fabrication method for β-Ga2O3 p-n heterojunctions.

外文关键词：

β-Ga2O3heterojunction structurep-n junctionsNiOmist-CVD

作者：

张泽雨林、宋庆文、刘丁赫、闫奕如、陈昊、穆昌根、陈大正、冯倩、张进成、张玉明、郝跃、张春福

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作者单位：

National Key Laboratory of Wide Bandgap Semiconductor Devices and Integrated Technology,School of Microelectronics,Xidian University,Xi'an 710071,China

关键词：

β-Ga2O3 heterojunction structure p-n junctions NiO mist-CVD

基金：

National Key R&D Program of ChinaNational Key R&D Program of ChinaFundamental Research Funds for the Central UniversitiesNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNatural Science Basic Research Program of ShaanxiInnovation Capability Support Program of ShaanxiWuhu and Xidian University Special Fund for Industryuniversityresearch CooperationWuhu and Xidian University Special Fund for Industryuniversityresearch Cooperation

项目编号：

2022YFB36054022021YFB3601800622741326200415162274126621741232021JC-242021TD-04XWYCXY-012021001XWYCXY-012021006

出版年：

2024

DOI：

10.1007/s40843-023-2801-2

中国科学:材料科学(英文)

CSTPCD

ISSN：

年,卷(期)：2024.67(5)