高功率密度外延的单晶金刚石制备高性能辐射探测器

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中文摘要：辐射探测器是用来研究超宽禁带半导体金刚石中载流子动力学的重要表征工具.本文采用微波等离子体化学气相沉积(MPCVD)方法在高温高压(HTHP)金刚石衬底上制备了高质量的单晶金刚石.我们通过压缩等离子体球来提高微波功率密度,优化了等离子体中的碳氢(C/H)比,并显著降低了金刚石外延层中的杂质和位错含量.(004)面X射线衍射摇摆曲线的半高宽(FWHM)仅为15弧秒,在室温下的光致发光光谱中没有检测到杂质发光带.使用制备的200 μm厚的外延金刚石膜制成的辐射探测器可对α.粒子响应,其电子的电荷收集效率为97.03％,能量分辨率为2.1％,空穴的电荷收集效率和能量分辨率为97.86％和1.5％.此外,电子和空穴的迁移率和寿命的乘积分别达到8 × 10-5和4.1 × 10-4cm2V-1.此方法有望满足商用金刚石辐射探测器对性能和成本控制的严苛要求.

外文标题：Single-crystal diamond grown through high-power-density epitaxy used for a high-performance radiation detector

外文摘要：Radiation detectors are important device-level characterization tools of the carrier dynamics of diamond as an ultrawide-bandgap semiconductor.Herein,a high-quality single-crystal diamond was grown on a high-temperature and high-pressure diamond substrate through microwave plasma chemical vapor deposition.We achieved the enhancement of microwave power density by compressing a plasma ball and optimizing the carbon-hydrogen ratio(C/H)within the plas-ma and thus considerably diminished the impurity and dis-location densities of the diamond epilayer.The full width at half maximum of the X-ray(004)reflection rocking curve was 15 arcsec,and no impurity emission bands were detectable in the photoluminescence spectrum at room temperature(25℃).The radiation detector made from this 200-μm-thick diamond epifilm demonstrated an α-particle response with a charge collection efficiency of 97.03％and energy resolutions of 2.1％for electrons and 97.86％and 1.5％for holes.Furthermore,the product of mobility and lifetime of electrons and holes reached 8 × 10-5 and 4.1 × 10-4cm2V-1,respectively.The epitaxial method reduces costs while fulfilling the stringent requirements of radiation detection for commercial applica-tions.

外文关键词：

single-crystal diamondradiation detectorshigh-power-density epitaxycharge collection efficiency

作者：

丁森川、张金风、苏凯、任泽阳、陈军飞、杨智清、张进成、郝跃

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作者单位：

State Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology,School of Microelectronics,Xidian University,Xi'an 710071,China

Xidian-Wuhu Research Institute,Wuhu 241002,China

关键词：

single-crystal diamond radiation detectors high-power-density epitaxy charge collection efficiency

基金：

National Key Research and Development Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaChina Postdoctoral Science FoundationKey research and development program of Anhui ProvinceKey R&D Plan of Shandong Province

项目编号：

2022YFB3608600621340066220419362374122621278122021TQ02562023a050200062022CXGC020306

出版年：

2024

DOI：

10.1007/s40843-024-2955-x

中国科学:材料科学(英文)

CSTPCD

ISSN：

年,卷(期)：2024.67(7)