New Mechanisms and Methods for Atomic Precision Manufacturing
At present,the performance requirements of high-performance equipment in national strategic areas such as aerospace,nuclear physics,microelectronics,optoelectronics,and semiconductors are becoming increasingly stringent.The manufacturing accuracy of core components must reach the atomic level.However,there is still a large gap between our country and developed countries'manufacturing accuracy of high-performance parts such as nuclear fusion ignition targets,high power laser optics,optical waveguide structures,and thin-walled brittle micro-resonators.It is urgent to study new mechanisms and methods for high-performance manufacturing with atomic precision.This article systematically sorts out the four major directions of atomic precision manufacturing assisted by energy fields,multi-energy field-assisted atom rearrangement,surface energy weakening atomic precision material removal,and atomic structure processing beyond optical diffraction limit,and introduces the research status of new principles and methods for atomic precision manufacturing in different application scenarios.For the key scientific problem of the mechanism of interatomic interaction and shape-performance tuning under multi-energy field coupling conditions,research suggestions are proposed in the four directions.