首页|衬底加热温度以及氧等离子体处理对磁控溅射CdS性质的影响以及其在太阳能电池中的应用

衬底加热温度以及氧等离子体处理对磁控溅射CdS性质的影响以及其在太阳能电池中的应用

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硫化镉(CdS)是一种具有优异导电性的n型半导体,广泛用作太阳能电池中的电子传输材料.目前,已经出现了许多制备CdS薄膜的方法,其中磁控溅射(MS)是最常用的真空技术之一.对于这类技术,衬底温度是影响生长薄膜和衬底之间的界面性质的关键沉积参数之一,决定了膜的特定生长规律.本文研究了衬底温度对磁控溅射CdS(MS-CdS)薄膜微观拮构和电学性能的影响,并首次将其应用于水热沉积硒化锑(Sb2(S,Se)3)太阳能电池.调节衬底温度不仅设计出具有增强结晶度的平坦致密的膜,而且与Sb2(S,Se)3层形成更有利于电子转移的能级排列.此外,我们开发了一种用于CdS的氧等离子体处理,减少了器件的寄生吸收,并增加了太阳能电池的短路电流密度.本研究证明了磁控溅射CdS在制备水热Sb2(S,Se)3太阳能电池中的可行性,并为提高器件性能提供了界面优化策略.
Effect of substrate temperature and oxygen plasma treatment on the properties of magnetron-sputtered CdS for solar cell applications
Cadmium sulfide(CdS)is an n-type semiconductor with excellent electrical conductivity that is widely used as an electron transport material(ETM)in solar cells.At present,numerous methods for preparing CdS thin films have emerged,among which magnetron sputtering(MS)is one of the most commonly used vacuum techniques.For this type of technique,the substrate temperature is one of the key deposition parameters that affects the interfacial properties between the target film and substrate,determining the specific growth habits of the films.Herein,the effect of substrate temperat-ure on the microstructure and electrical properties of magnetron-sputtered CdS(MS-CdS)films was studied and applied for the first time in hydrothermally deposited antimony selenosulfide(Sb2(S,Se)3)solar cells.Adjusting the substrate tem-perature not only results in the design of the flat and dense film with enhanced crystallinity but also leads to the formation of an energy level arrangement with a Sb2(S,Se)3 layer that is more favorable for electron transfer.In addition,we de-veloped an oxygen plasma treatment for CdS,reducing the parasitic absorption of the device and resulting in an increase in the short-circuit current density of the solar cell.This study demonstrates the feasibility of MS-CdS in the fabrication of hydrothermal Sb2(S,Se)3 solar cells and provides interface optimization strategies to improve device performance.

magnetron sputteringCdSsubstrate heatingplasma treatmentSb2(S,Se)3thin filmsolar cell

臧润宣、王颢霖、彭小琪、李科、顾月皓、董熠哲、严志昊、蔡志远、高徽徽、盛淑伟、唐荣风、陈涛

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中国科学技术大学化学与材料科学学院材料科学与工程系,安徽合肥 230026

磁控溅射 CdS 衬底加热 等离子体处理 Sb2(S,Se)3 薄膜 太阳能电池

National Natural Science Foundation of ChinaNational Key Research and Development Program of ChinaCollaborative Innovation Program of Hefei Science Center,CASUniversity Synergy Innovation Program of Anhui Province

222751802019YFA0405600GXXT-2023-031

2024

10.52396/JUSTC-2024-0048

中国科学技术大学学报
中国科学技术大学

中国科学技术大学学报

CSTPCD北大核心
影响因子：0.421
ISSN：0253-2778
年,卷(期)：2024.54(6)