自支撑氧化物薄膜的制备及其相关物性和器件应用
Freestanding oxide membranes:synthesis,tunable physical properties,and functional devices
王傲 1章金凤 1王凌飞1
作者信息
- 1. 中国科学技术大学合肥微尺度物质科学国家研究中心,安徽合肥 230026
- 折叠
摘要
对氧化物异质外延的研究一直受到失配应变和衬底夹持的阻碍,这严重影响了对氧化物体系的性能优化和对其基本性质的理解.近年来发展的自支撑薄膜制备技术为解决上述问题提供了新的方案,已有研究表明单晶氧化物薄膜能从衬底上无损剥离并转移到任意基材上.本文基于氧化物薄膜,总结了自支撑氧化物薄膜制备方法、相关物性研究以及器件方面应用.首先,我们汇总了自支撑氧化物薄膜制备及转移的主要策略;其次,也探讨了自支撑氧化物薄膜所表现出的新颖物性,特别是在不同应变状态下的物性调控研究;最后,我们介绍了三种基于自支撑氧化物薄膜的代表性器件.总的来说,本篇综述展现了自支撑氧化物薄膜在新型柔性器件等相关领域的巨大潜力.
Abstract
The study of oxide heteroepitaxy has been hindered by the issues of misfit strain and substrate clamping,which impede both the optimization of performance and the acquisition of a fundamental understanding of oxide systems.Re-cently,however,the development of freestanding oxide membranes has provided a plausible solution to these substrate limitations.Single-crystalline functional oxide films can be released from their substrates without incurring significant damage and can subsequently be transferred to any substrate of choice.This paper discusses recent advancements in the fabrication,adjustable physical properties,and various applications of freestanding oxide perovskite films.First,we present the primary strategies employed for the synthesis and transfer of these freestanding perovskite thin films.Second,we explore the main functionalities observed in freestanding perovskite oxide thin films,with special attention to the tunable functionalities and physical properties of these freestanding perovskite membranes under varying strain states.Next,we encapsulate three representative devices based on freestanding oxide films.Overall,this review highlights the po-tential of freestanding oxide films for the study of novel functionalities and flexible electronics.
关键词
自支撑氧化物薄膜/过渡金属氧化物/薄膜/电子器件Key words
freestanding oxide membranes/transition metal oxides/thin films/electronic devices引用本文复制引用
基金项目
Fundamental Research Funds for the Central Universities(WK9990000102)
Fundamental Research Funds for the Central Universities(WK2030000035)
出版年
2024
NETL
NSTL
万方数据