摘要
随着电子行业的精细化发展,高纯钼因其薄膜应力小、高温稳定性好,导电性能良好,比阻抗低广泛应用于电子行业.本文系统概述了高纯钼粉的制备技术,包括高纯钼原料(钼酸铵、MoO3、MoCl5、Mo(CO)6、MoS3 等)清洁化还原分解技术和普通钼粉电子束熔炼及等离子球化提纯技术,重点讨论了沉淀法、溶剂萃取法、离子交换法、结晶法等提高钼酸铵纯度的方法,指出了不同提纯方法存在的优势与不足,并就高纯钼粉制备技术及应用前景进行了总结与讨论.
Abstract
With the fine development of the electronics industry,high purity molybdenum is widely used in the elec-tronics industry because of its small film stress,good high temperature stability,good electrical conductivity and low impedance.This paper systematically summarizes the preparation technology of high purity molybdenum pow-der,including:clean reduction decomposition technology of high purity molybdenum raw materials(ammonium mo-lybdate,MoO3,MoCl5,Mo(CO)6,MoS3,etc.),ordinary molybdenum powder electron beam melting and plasma spheroidization purification technology.Precipitation method,solvent extraction method,ion exchange method and crystallization method to improve the purity of ammonium molybdate are emphatically discussed.The advantages and disadvantages of different purification methods were pointed out.The preparation technology and application prospect of high purity molybdenum powder were summarized and discussed.
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