Curve Fitting of X-ray Photoelectron Spectroscopy(XPS)
X-ray photoelectron spectroscopy(XPS)curve fitting is a commonly used technique for post-processing data results.In practical work,users who lack experience in XPS analysis are confused about the uncertainty of peak fitting results.In order to maximize the certainty of the results,XPS peak processing requires necessary analysis and judgment of the XPS collected from the sample,selection of the correct curve-synthesis model,reasonable parameter values or ranges,and selection of appropriate peak background subtraction methods.On the basis of briefly describing the basic theory of peak fitting,this article analyzes and evaluates the influence of fitting parameters on fitting results,explores peak fitting techniques,and strives to improve the certainty of XPS peak results by listing typical cases of O 1s self-overlap spectra,C 1s and Ru 3d overlap spectra,and N 1s and GaLM Auger peak group overlap spectra.
XPSpeak overlapcurve-synthesis and curve-fittingVoigt-type function
万方数据
维普
