Exploration of Common Problems in the Application of X-ray Photoelectron Spectroscopy Testing Technology
X-ray photoelectron spectroscopy(XPS)has been widely used in new energy,catalysis,semiconductor and other fields.However,the reliability and authenticity of XPS data are related to the experience of test engineers,and it is a surface analysis technology to test testing experience.In order to summarize the application of X-ray photoelectron spectroscopy testing technology,the test principle,sampling method,setting of test parameter and common problems of instrument calibration and testing were summarized.In the test principle,the charge effect and its compensation method,sampling depth and target selection are summarized.In the sample preparation,the sample requirements,the selection of sample plates and the key points of sample preparation were introduced in detail.In the test parameters,the parameters setting of the surface and deep profile spectra were described,and the relationship between the test flux and the energy resolution was emphasized.In the instrument calibration,the energy resolution test and nonlinear correction substances were described.Finally,the common problems of XPS data were summarized.It is hoped that in the future,instruments with good spatial resolution,high energy resolution and more stable functions can be developed to meet more testing needs.
万方数据
维普
