首页|ADATOM, VACANCY AND SPUTTERING YIELDS OF ENERGETIC PtATOMS IMPACTING ON Pt(100) BYMOLECULAR DYNAMICS SIMULATION
ADATOM, VACANCY AND SPUTTERING YIELDS OF ENERGETIC PtATOMS IMPACTING ON Pt(100) BYMOLECULAR DYNAMICS SIMULATION
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We have studied the influence of incident atoms with low energy on the Pt(100) surface by molecular dynamicssimulation. The interaction potential obtained by the embedded atom method (EAM) was used in the simulation. Theincident energy changes from 0.leV to 200eV, and the target temperature ranges from 100 to 500 K. The target scalesare 6×6×4 and 8×8×4 fcc cells for lower and higher incident energies, respectively. The adatom, sputtering, vacancyand backscattering yields are calculated. It was found that there is a sputtering threshold for the incident energy. Whenthe incident energy is higher than the sputtering threshold, the sputtering yield increases with the increase of incidentenergy, and the sputtering shows a symmetrical pattern. We found that the adatom and vacancy yields increase asthe incident energy increases. The vacancy yields are much higher than those obtained by Monte Carlo simulation.The dependence of the adatom and sputtering yields on the incident energy and the relative atomistic mechanisms arediscussed.
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