首页|Silicon-based optoelectronic heterogeneous integration for optical interconnection

Silicon-based optoelectronic heterogeneous integration for optical interconnection

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The performance of optical interconnection has improved dramatically in recent years.Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection,which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip,but also im-proves the system performance through advanced heterogeneous integrated packaging.This paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical interconnection.The research sta-tus,development trend and application of ultra-low loss optical waveguides,high-speed detectors,high-speed modulators,lasers and 2D,2.5D,3D and monolithic integration are focused on.

silicon-based heterogeneous integrationheterogeneous integrated materialsheterogeneous inte-grated packagingoptical interconnection

李乐良、李贵柯、张钊、刘剑、吴南健、王开友、祁楠、刘力源

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Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

Center of Material Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

National Key Research and Development Program of ChinaNational Natural Science Foundation of ChinaChina Postdoctoral Science Foundation

2021YFB2206504622350172021M703125

2024

10.1088/1674-1056/ad0e5b

中国物理B(英文版)
中国物理学会和中国科学院物理研究所

中国物理B(英文版)

CSTPCDEI
影响因子：0.995
ISSN：1674-1056
年,卷(期)：2024.33(2)
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