Plasma potential measurements using an emissive probe made of oxide cathode

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外文摘要：A novel emissive probe consisting of an oxide cathode coating is developed to achieve a low operating temperature and long service life.The properties of the novel emissive probe are investigated in detail,in comparison with a traditional tungsten emissive probe,including the operating temperature,the electron emission capability and the plasma potential measurement.Studies of the operating temperature and electron emission capability show that the tungsten emissive probe usually works at a temperature of 1800 K-2200 K while the oxide cathode emissive probe can function at about 1200 K-1400 K.In addition,plasma potential measurements using the oxide cathode emissive probe with different techniques have been accomplished in microwave electron cyclotron resonance plasmas with different discharge powers.It is found that a reliable plasma potential can be obtained using the improved inflection point method and the hot probe with zero emission limit method,while the floating point method is invalid for the oxide cathode emissive probe.

外文关键词：

emissive probeoxide cathodeplasma potentialfilament temperature

作者：

李建泉、马海杰、陆文琪

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作者单位：

Department of Electronic and Communication Engineering,North China Electric Power University,Baoding 071003,China

Hebei Key Laboratory of Power Internet of Things Technology,North China Electric Power University,Baoding 071003,China

Key Laboratory of Materials Modification by Laser,Ion and Electron Beams,School of Physics,Dalian University of Technology,Dalian 116024,China

基金：

国家自然科学基金河北省科技计划

项目编号：

11905076SZX2020034

出版年：

2024

DOI：

10.1088/1674-1056/ad1821

中国物理B(英文版)

中国物理学会和中国科学院物理研究所

中国物理B(英文版)

CSTPCDEI

影响因子：0.995

ISSN：1674-1056

年,卷(期)：2024.33(4)

参考文献量30