首页|Optimal parameter space for stabilizing the ferroelectric phase of Hf0.5Zr0.5O2 thin films under strain and electric fields

Optimal parameter space for stabilizing the ferroelectric phase of Hf0.5Zr0.5O2 thin films under strain and electric fields

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Hafnia-based ferroelectric materials,like Hf0.5Zr0.5O2(HZO),have received tremendous attention owing to their potentials for building ultra-thin ferroelectric devices.The orthorhombic(O)-phase of HZO is ferroelectric but metastable in its bulk form under ambient conditions,which poses a considerable challenge to maintaining the operation performance of HZO-based ferroelectric devices.Here,we theoretically addressed this issue that provides parameter spaces for stabilizing the O-phase of HZO thin-films under various conditions.Three mechanisms were found to be capable of lowering the relative energy of the O-phase,namely,more significant surface-bulk portion of(111)surfaces,compressive c-axis strain,and positive electric fields.Considering these mechanisms,we plotted two ternary phase diagrams for HZO thin-films where the strain was applied along the in-plane uniaxial and biaxial,respectively.These diagrams indicate the O-phase could be stabilized by solely shrinking the film-thickness below 12.26 nm,ascribed to its lower surface energies.All these results shed considerable light on designing more robust and higher-performance ferroelectric devices.

Hf0.5Zr0.5O2orthorhombic phaseferroelectric filmsphase stabilitythickness-dependentternary phase diagrams

王侣锦、王聪、周霖蔚、周谐宇、潘宇浩、吴幸、季威

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Beijing Key Laboratory of Optoelectronic Functional Materials & Micro-Nano Devices,Department of Physics,Renmin University of China,Beijing 100872,China

Key Laboratory of Quantum State Construction and Manipulation(Ministry of Education),Renmin University of China,Beijing 100872,China

In Situ Devices Center,School of Integrated Circuits,East China Normal University,Shanghai 200241,China

Fund from the Ministry of Science and Technology(MOST)of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaStrategic Priority Research Program of the Chinese Academy of SciencesFundamental Research Funds for the Central UniversitiesResearch Funds of Renmin University of China

2018YFE02027001197442212104504XDB3000000022XNKJ30

2024

10.1088/1674-1056/ad498b

中国物理B(英文版)
中国物理学会和中国科学院物理研究所

中国物理B(英文版)

CSTPCDEI
影响因子：0.995
ISSN：1674-1056
年,卷(期)：2024.33(7)
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