Multidimensional images and aberrations in STEM

Eric R.Hoglund ¹Andrew R.Lupini¹

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作者信息

1. Center for Nanophase Materials Sciences,Oak Ridge National Laboratory,Oak Ridge,TN 37831,United States
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Abstract

Recent advances in scanning transmission electron microscopy(STEM)have led to increased development of multi-dimensional STEM imaging modalities and novel image reconstruction methods.This interest arises because the main electron lens in a modern transmission electron microscope usually has a diffraction-space information limit that is signif-icantly better than the real-space resolution of the same lens.This state-of-affairs is sometimes shared by other scattering methods in modern physics and contributes to a broader excitement surrounding multidimensional techniques that scan a probe while recording diffraction-space images,such as ptychography and scanning nano-beam diffraction.However,the contrasting resolution in the two spaces raises the question as to what is limiting their effective performance.Here,we examine this paradox by considering the effects of aberrations in both image and diffraction planes,and likewise separate the contributions of pre-and post-sample aberrations.This consideration provides insight into aberration-measurement techniques and might also indicate improvements for super-resolution techniques.

Key words

scanning transmission electron microscopy(STEM)/aberrations

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基金项目

U.S.Department of Energy,Office of Basic Energy Sciences(DOE-BES)()

Division of Materials Sciences and Engineering(ERKCS89)

UT-Battelle,LLC,with the DOE(DE-AC05-00OR22725)

Laboratory Directed Research and Development Program of Oak Ridge National Laboratory()

UT-Battelle,LLC,for the U.S.Department of Energy()

出版年

2024

中国物理B(英文版)

中国物理学会和中国科学院物理研究所

中国物理B(英文版)

CSTPCDEI

影响因子：0.995

ISSN：1674-1056

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