Ultrasensitive Mechanical Sensor Using Tunable Ordered Array of Metallic and Insulating States in Vanadium Dioxide

马泽成 ¹闫胜楠 ¹陈繁强 ¹戴玉頔 ¹刘增霖 ¹徐康 ¹徐涛 ²童湛钦 ¹陈墨雨 ¹王利铮 ¹王鹏飞 ¹孙立涛 ²程斌 ³梁世军 ¹缪峰¹

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作者信息

1. Institute of Brain-Inspired Intelligence,National Laboratory of Solid State Microstructures,School of Physics,Collaborative Innovation Center of Advanced Microstructures,Nanjing University,Nanjing 210093,China
2. SEU-FEI Nano-Pico Center,Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China
3. Institute of Interdisciplinary of Physical Sciences,School of Science,Nanjing University of Science and Technology,Nanjing 210094,China
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Abstract

Detecting tiny deformations or vibrations,particularly those associated with strains below 1％,is essential in various technological applications.Traditional intrinsic materials,including metals and semiconductors,face challenges in simultaneously achieving initial metallic state and strain-induced insulating state,hindering the development of highly sensitive mechanical sensors.Here we report an ultrasensitive mechanical sensor based on a strain-induced tunable ordered array of metallic and insulating states in the single-crystal bronze-phase vanadium dioxide[VO2(B)]quantum material.It is shown that the initial metallic state in the VO2(B)flake can be tuned to the insulating state by applying a weak uniaxial tensile strain.Such a unique property gives rise to a record-high gauge factor of above 607970,surpassing previous values by an order of magnitude,with excellent linearity and mechanical resilience as well as durability.As a proof-of-concept application,we use our proposed mechanical sensor to demonstrate precise sensing of the micro piece,gentle airflows and water droplets.We attribute the superior performance of the sensor to the strain-induced continuous metal-insulator transition in the single-crystal VO2(B)flake,evidenced by experimental and simulation results.Our findings highlight the potential of exploiting correlated quantum materials for next-generation ultrasensitive flexible mechanical sensors,addressing critical limitations in traditional materials.

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基金项目

National Key R&D Program of China(2023YFF1203600)

National Key R&D Program of China(2023YFF0718400)

National Natural Science Foundation of China(62122036)

National Natural Science Foundation of China(12322407)

National Natural Science Foundation of China(62034004)

National Natural Science Foundation of China(61921005)

National Natural Science Foundation of China(12074176)

Leadingedge Technology Program of Jiangsu Natural Science Foundation(BK20232004)

Strategic Priority Research Program of the Chinese Academy of Sciences(XDB44000000)

AIQ Foundation and the e-Science Center of Collaborative Innovation Center of Advanced Microstructures()

microfabrication center of the National Laboratory of Solid State Microstructures(NLSSM)()

出版年

2024

中国物理快报(英文版)

中国科学院物理研究所,中国物理学会

中国物理快报(英文版)

CSTPCDCSCDEI

影响因子：0.515

ISSN：0256-307X

参考文献量42

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