首页|Ultrasensitive Mechanical Sensor Using Tunable Ordered Array of Metallic and Insulating States in Vanadium Dioxide

Ultrasensitive Mechanical Sensor Using Tunable Ordered Array of Metallic and Insulating States in Vanadium Dioxide

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Detecting tiny deformations or vibrations,particularly those associated with strains below 1％,is essential in various technological applications.Traditional intrinsic materials,including metals and semiconductors,face challenges in simultaneously achieving initial metallic state and strain-induced insulating state,hindering the development of highly sensitive mechanical sensors.Here we report an ultrasensitive mechanical sensor based on a strain-induced tunable ordered array of metallic and insulating states in the single-crystal bronze-phase vanadium dioxide[VO2(B)]quantum material.It is shown that the initial metallic state in the VO2(B)flake can be tuned to the insulating state by applying a weak uniaxial tensile strain.Such a unique property gives rise to a record-high gauge factor of above 607970,surpassing previous values by an order of magnitude,with excellent linearity and mechanical resilience as well as durability.As a proof-of-concept application,we use our proposed mechanical sensor to demonstrate precise sensing of the micro piece,gentle airflows and water droplets.We attribute the superior performance of the sensor to the strain-induced continuous metal-insulator transition in the single-crystal VO2(B)flake,evidenced by experimental and simulation results.Our findings highlight the potential of exploiting correlated quantum materials for next-generation ultrasensitive flexible mechanical sensors,addressing critical limitations in traditional materials.

马泽成、闫胜楠、陈繁强、戴玉頔、刘增霖、徐康、徐涛、童湛钦、陈墨雨、王利铮、王鹏飞、孙立涛、程斌、梁世军、缪峰

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Institute of Brain-Inspired Intelligence,National Laboratory of Solid State Microstructures,School of Physics,Collaborative Innovation Center of Advanced Microstructures,Nanjing University,Nanjing 210093,China

SEU-FEI Nano-Pico Center,Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China

Institute of Interdisciplinary of Physical Sciences,School of Science,Nanjing University of Science and Technology,Nanjing 210094,China

National Key R&D Program of ChinaNational Key R&D Program of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaNational Natural Science Foundation of ChinaLeadingedge Technology Program of Jiangsu Natural Science FoundationStrategic Priority Research Program of the Chinese Academy of SciencesAIQ Foundation and the e-Science Center of Collaborative Innovation Center of Advanced Microstructuresmicrofabrication center of the National Laboratory of Solid State Microstructures(NLSSM)

2023YFF12036002023YFF07184006212203612322407620340046192100512074176BK20232004XDB44000000

2024

10.1088/0256-307X/41/7/077101

中国物理快报(英文版)
中国科学院物理研究所,中国物理学会

中国物理快报(英文版)

CSTPCDEI
影响因子：0.515
ISSN：0256-307X
年,卷(期)：2024.41(7)