Strategy of preparing SmCo based films with high coercivity and remanence ratio achieved by temperature and chemical optimization

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外文摘要：SmCo based films with excellent intrinsic magnetic properties have promising applications in micro-electro-mechanical system(MEMS).However,due to the complexity of phase composition and uncon-trollable crystallization degree of SmCo hard magnetic phase in the film,both the coercivity(Hc)and remanence(Mr)of films are difficult to enhance simultaneously.In this paper,SmCo based films were deposited with a Cr underlayer and capping layer on single crystal Si substrates via magnetron sputtering process.The effects of annealing parameters and Sm/Co atomic ratio on the phase structure and coer-civity of films are discussed.By adjusting the Sm/Co atomic ratio from 1∶5 to 1∶4,Co soft magnetic phase disappears and the single phase SmCo5 is obtained,leading to the increase of coercivity of the films from 30 to 34 kOe.The influence of deposition temperature and Cu doping on magnetic properties of SmCo based films was investigated.When the deposition temperature increases from room temperature to 250 ℃,the coercivity will further increase from 34 to 51 kOe.However,a severe kink is observed in the demagnetization curves due to the poor exchanged coupling.An analysis of transmission electron mi-croscopy(TEM)confirms that the average size of non-hard magnetic amorphous phase exceeds the effective exchanged coupling length of SmCo5,which contributes to the decoupling and low remanence ratio.Therefore,doping Cu and applying a post-annealing process can significantly improve the crys-tallization degree of the films.Both the coercivity and the remanence ratio of the demagnetization curves are greatly enhanced.We propose a plausible strategy to prepare the SmCo based films with high coercivity and remanence ratio by temperature and chemical optimization,which can be utilized in high performed MEMS devices.

外文关键词：

Rare earthsSmCo based filmsPhase compositionCrystallization conditionsCoercivityRemanence ratio

作者：

Yansong Gong、Zhaoguo Qiu、Sizhe Liang、Xinrui Zheng、Hongxia Meng、Zhigang Zheng、Deyang Chen、Shengfu Yuan、Weixing Xia、Dechang Zeng、J.P. Liu

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作者单位：

School of Materials Science and Engineering,South China University of Technology,Guangzhou 510640,China

Zhongshan R&D Center for Materials Surface and Thin Films Technology of the South China University of Technology,Gent Materials Surface Technology(Guangdong)Co.,Ltd.,Zhongshan 528437,China

Institute for Advanced Materials,South China Academy of Advanced Optoelectronics,South China Normal University,Guangzhou,510006,China

Yangjiang Branch,Guangdong Laboratory Materials Science and Technology Yangjiang Advanced Alloys Laboratory,Yangjiang,529500,China

Laboratory of Rare-Earth Magnetic Functional Materials,Ningbo Institute of Material Technology and Engineering,Chinese Academy of Sciences,Ningbo,315201,China

Department of Physics,University of Texas at Arlington,Arlington,TX76019,USA

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基金：

National Key R&D Program of ChinaNational Key R&D Program of ChinaNational Natural Science Foundation of ChinaR&D(Research and Development)Plan in Key Areas of Guangdong ProvinceR&D(Research and Development)Plan in Key Areas of Guangdong ProvinceNatural Science Foundation of Guangdong ProvinceNatural Science Foundation of Guangdong ProvinceGuangzhou Municipal Science and Technology ProgramFundamental Research Funds for the Central UniversitiesOpening Project of National Engineering Research Center for Powder Metallurgy of Titanium &Rare MetalsFundamental Research Funds for the Central Universities and Zhongshan Municipal Science and Technology ProgramZhongshan Collaborative Innovation Fund

项目编号：

2022YFB35057002022YFB380790051901079SDZX20210022120210326117000012020A15150107362021A15150104512020070200081910071026290942018C1001

出版年：

2024

DOI：

10.1016/j.jre.2023.06.012

稀土学报(英文版)

中国稀土学会

稀土学报(英文版)

CSTPCDEI

影响因子：1.3

ISSN：1002-0721

年,卷(期)：2024.42(7)