中国有色金属学报2024,Vol.34Issue(10) :3406-3421.DOI:10.11817/j.ysxb.1004.0609.2024-44771

基于分子动力学的纳米银烧结互连性能

Interconnect properties of silver nanoparticles sintering based on molecular dynamics

张健生 叶贵根 张彭 孟康
中国有色金属学报2024,Vol.34Issue(10) :3406-3421.DOI:10.11817/j.ysxb.1004.0609.2024-44771

基于分子动力学的纳米银烧结互连性能

Interconnect properties of silver nanoparticles sintering based on molecular dynamics

张健生 1叶贵根 1张彭 1孟康1
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作者信息

  • 1. 中国石油大学(华东)储运与建筑工程学院,青岛 266580
  • 折叠

摘要

建立了芯片(SiC)和基板(Cu)通过纳米银颗粒(AgNPs)烧结互连的分子动力学模型,模拟了不同温度下的烧结过程,对烧结样品和互连界面进行了单轴拉伸模拟,总结了烧结温度对烧结样品整体强度和界面强度的影响规律.结果表明:烧结温度较低时,AgNPs与SiC板间的烧结颈宽度大于AgNPs与Cu板间的烧结颈宽度,而烧结温度比较高时则情况相反.烧结样品整体拉伸断裂位置将偏向烧结颈宽度较小的一侧,两个烧结颈的宽度差越小,断裂位置越趋向中间位置,且整体拉伸断裂能与两个烧结颈的宽度差呈反比.SiC/Ag互连界面比较脆,并且烧结温度越高,脆性越明显,而Cu/Ag界面偏韧,其韧脆性受烧结温度的影响较小.

Abstract

The molecular dynamics model of interconnecting chips(SiC)and substrate(Cu)through sintering of silver nanoparticles(AgNPs)was established,and the sintering process at different temperatures was simulated.Uniaxial tensile simulations of the sintered samples and the interconnect interfaces were carried out,and the influences of sintering temperature on the overall strength of the sintered samples as well as the interface strength were summarized.The results show that the sintering neck width between AgNPs and SiC plate is larger than that between AgNPs and Cu plate at lower sintering temperatures,while the opposite is true at higher sintering temperatures.In addition,the tensile fracture position of the sintered sample will be inclined to the side with smaller sintering neck width.The smaller the width difference between the two sintering necks,the more the fracture location tends to the middle position,and the overall tensile fracture energy is inversely proportional to the width difference between the two sintering necks.Moreover,the interfacial strengths of the two bonding interfaces after sintering are higher than that of the AgNPs,and the interfacial strength increases significantly when the sintering temperatures is higher than 650 K.The SiC/Ag interconnect interface is brittle,and the higher the sintering temperature,the more obvious the brittleness.While the Cu/Ag interconnect interface is tough,and its toughness and brittleness are less affected by the sintering temperature.

关键词

烧结/纳米粒子/界面/力学性能/分子动力学模拟

Key words

sinter/nanoparticles/interface/mechanical properties/molecular dynamics simulation

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基金项目

国家自然科学基金资助项目(11972376)

山东省自然科学基金资助项目(ZR2019MA007)

中央高校基本科研经费资助项目(22CX03014A)

出版年

2024
中国有色金属学报
中国有色金属学会

中国有色金属学报

CSTPCDCSCD北大核心
影响因子:1.108
ISSN:1004-0609
参考文献量50
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