Aiming at the problems of low yield and low efficiency of the existing chip transfer technology,an efficient large-scale transfer technology of Mini/Micro LED chip—pneumatic mass transfer technology is studied in this paper.The method uses microporous gas needle injection to stabilize the air flow and cause the film protrusion deformation to realize the accurate and fast transfer of the LED chip to the target substrate.In this paper,fluid-structure coupling simulation is used to study and optimize the key parameters,including the physical properties and expansion degree of the film.The simulation results show that adjusting the elastic modulus and expansion degree of the film can significantly optimize the morphology of the film during the transfer process,thus improving the transfer precision.The experimental results show that the transfer accuracy can reach±15μm when the elastic modulus is28.2 MPa,the Poisson ratio is0.32 and the film expansion is40 mm.The proposed technology provides a potential solution for the high-quality production of Mini/Micro LED displays.
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