首页|微结构阵列在位检测系统研究

微结构阵列在位检测系统研究

扫码查看
在导光板模具钢上加工的微结构阵列的精度决定导光板的质量.在精密撞点机上加工导光板模具的过程中,需对加工的微结构阵列在位检测,因导光板模具取下再放回机床时加工条件已发生改变,后续撞点加工已无任何意义.通过Halcon研究的精密撞点机在位检测系统可以高精度的检测微结构阵列直径和圆心距,在检测系统设计中采用了阈值分割、圆孔填充、开运算等算子和运用了亚像素边缘提取和最小二乘法拟合圆等理论.通过高精度的白光干涉仪和设计的检测系统分别对相同的微结构阵列进行检测,通过检测数据对比验证了测量系统满足设计要求.
Research on In-situ Measurement System of Microstructure Array
The quality of the light guide plate is determined by the accuracy of the microstructure array pro-cessed on the light guide plate mold steel. In the process of precision hitting machine processing light guide plate mold, the processing of the microstructure of the array is in-situ measurement, if the light guide plate mold was removed and then back to the machine, the processing conditions had changed, there was no meaning hitting the follow-up points. The aperture measurement and aperture distance of the microstructure array can be measured with high precision by the research of Halcon. The algorithm of threshold segmenta-tion, holes filling and opening circle were used in the measurement system design, and the sub-pixel edge extraction and least squares fitting circle method were also usd. The high precision white light interferometer and the designed detection system respectively measure the same microstructure array, by comparing the da-ta, it is verified that the measurement system meets the design requirements.

microstructure arrayin-situ measurementHalcon

张霞峰、刘强、尹自强、赵荣丽、林剑

展开 >

广东工业大学 机电工程学院,广州 510006

微结构阵列 在位检测 Halcon

国家自然科学基金广东省微纳加工技术与装备重点实验室广东省应用型科技研发专项资金项目

516051012011A0609010212015B090921007

2018

组合机床与自动化加工技术
大连组合机床研究所 中国机械工程学会生产工程分会

组合机床与自动化加工技术

CSTPCD北大核心
影响因子:0.671
ISSN:1001-2265
年,卷(期):2018.(6)
  • 6